High-temperature resistant valve SCV submersible valve 'KD-S series'
Usable with a variety of gases in semiconductor manufacturing processes in high-temperature environments (up to 200℃)! A design concept that takes customer usability into consideration!
The "KD-S Series" is a diaphragm valve that incorporates unique technology, making it suitable for use in high-temperature environments. It is ideal for supplying precursors in atomic layer deposition (ALD) processes, where reproducibility of flow rate is required. By adopting a resin sheet, the durability performance in high-temperature environments, such as sheet leaks and lifecycle, has improved compared to metal sheet types. 【Features】 ■ Compatible with high-temperature environments ■ No product errors, ensuring compatibility after replacement ■ Stable and reproducible gas flow rates can be obtained ■ PFA, which excels in heat resistance and corrosion resistance, is used as the sheet material ■ Improved durability performance in high-temperature environments, such as sheet leaks and lifecycle *For more details, please refer to the PDF document or feel free to contact us.
- Company：KITZ SCT Corporation Tokyo Headoffice
- Price：Other
